Effect of the Si content on the microstructure of hard, multifunctional Hf–B–Si–C films prepared by pulsed magnetron sputtering

Published 2015 View Full Article

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Title
Effect of the Si content on the microstructure of hard, multifunctional Hf–B–Si–C films prepared by pulsed magnetron sputtering
Authors
Keywords
Hard coatings, Pulsed magnetron sputtering, High-resolution transmission electron microscopy, X-ray photoelectron spectroscopy, Electron diffraction
Journal
APPLIED SURFACE SCIENCE
Volume 357, Issue -, Pages 1343-1354
Publisher
Elsevier BV
Online
2015-10-10
DOI
10.1016/j.apsusc.2015.09.249

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