Interpolymer complexes of poly(acrylic acid) and poly(ethylene glycol) for low dishing in STI CMP

Published 2015 View Full Article

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Title
Interpolymer complexes of poly(acrylic acid) and poly(ethylene glycol) for low dishing in STI CMP
Authors
Keywords
Passivation agent, PAA, PEG, Interpolymer complexes, Dishing, CMP
Journal
APPLIED SURFACE SCIENCE
Volume 353, Issue -, Pages 499-503
Publisher
Elsevier BV
Online
2015-06-23
DOI
10.1016/j.apsusc.2015.06.078

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