Electrical and optical properties of ZnO:Al films with different hydrogen contents in sputtering gas

Title
Electrical and optical properties of ZnO:Al films with different hydrogen contents in sputtering gas
Authors
Keywords
ZnO:Al thin films, Hydrogen, Electrical resistivity, Transmittance, IR reflectance
Journal
RARE METALS
Volume 34, Issue 3, Pages 173-177
Publisher
Springer Nature
Online
2015-01-29
DOI
10.1007/s12598-014-0435-8

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