Substrate-Induced Controllable Wrinkling for Facile Nanofabrication

In this work, we report a facile and effective strategy to generate patterned wrinkles. This strategy includes first adhering a thin poly(dimethylsiloxane) (PDMS) film (<82 mu m) on porous conductive adhesive tape (CAT), followed by sputter coating of Au onto PDMS under vacuum condition, which results in formation of patterned wrinkles on the Au-PDMS bilayer. CAT was found to induce local stretching of PDMS thin film, which was the key for controlled wrinkle formation. Compared with previous wrinkling methods, our strategy is simpler and gives smaller feature sizes (down to 300 nm).