Journal
APPLIED SURFACE SCIENCE
Volume 353, Issue -, Pages 522-529Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2015.06.040
Keywords
W/Ti-doped DLC film; Internal stress; Mechanical properties; Tribological performance
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Funding
- 973 program [2013CB632300]
- National Natural Science Foundation of China [51275508, 51205383]
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W/Ti-doped diamond-like carbon (DLC) films were fabricated on Si substrates by co-sputtering W and Ti targets in methane and argon mixture atmosphere. The composition and the microstructure, internal stress, mechanical and tribological properties of the films were measured by X-ray photoelectron spectroscopy (XPS), high-resolution transmission electron microscopy (HRTEM), Raman spectra, BGS 6341 type film stress tester, nano-indentor and reciprocating ball-on-disc tester, respectively. The results indicated all films showed the amorphous structural characteristics and a constant thickness value of similar to 600 nm (195 +/- 15 nm Ti interlayer was designed in order to minimize the influence of Ti interlayer), and the Ti content increased from 0 to 34.5% as the W target current increased from OA to 14A. As the W concentration increased from 0 to 2.6 at.%, the hardness increased to 12.7 GPa and the internal stress maintained at a low value and almost no change. Meanwhile, the friction coefficient and wear rate showed the lowest value (0.023 and 1.2 x 10(-8) mm(3)/N m, respectively). With the W content increased to 34.5 at.% further, the internal stress, friction coefficient and wear rate of film are dramatically increased. (C) 2015 Elsevier B.V. All rights reserved.
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