4.7 Article

Surface properties of W-implanted TiN coatings post-treated by low temperature ion sulfurization

Journal

APPLIED SURFACE SCIENCE
Volume 353, Issue -, Pages 1156-1163

Publisher

ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2015.07.017

Keywords

Ion implantations; Low temperature ion sulfurization; Tungsten; TiN coatings; Surface

Funding

  1. National Natural Science Foundation of China [51375466]
  2. Beijing Natural Science Foundation [3132023]
  3. Fundamental Research Funds for the Central Universities [2652013075, 2652013081]

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TiN coatings were implanted with W ions by metal vapor vacuum arc (MEVVA) source at dose of 9 x 10(17) ions/cm(2), and then they were post-treated by low temperature ion sulfurization (LTIS) at 160 degrees C. The W-implanted TiN samples were characterized before and after post-treatment of LTIS, using Scanning Electron Microscopy (SEM), Scanning Auger Microprobe (SAM), X-ray diffraction (XRD), and Nano Indenter System. Friction and wear properties were evaluated using a ball-on-disc tribometer under dry sliding in air. After post-treatment of LTIS, XRD results showed no diffraction peaks of tungsten sulfides on surfaces of W-implanted TiN coatings; W-implanted TiN coatings were sputtered by the sulfur plasma with about 36% reducing of W depth. Further, the nano-hardness decreased mainly due to the amount decreasing of Ti2N and the formation of more metal oxides on surfaces of W-implanted TiN coatings after LTIS. As a result, LTIS treatment could not well improve tribological properties of W-implanted TiN coatings. (C) 2015 Elsevier B.V. All rights reserved.

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