Nucleation and initial growth of atomic layer deposited titanium oxide determined by spectroscopic ellipsometry and the effect of pretreatment by surface barrier discharge

Title
Nucleation and initial growth of atomic layer deposited titanium oxide determined by spectroscopic ellipsometry and the effect of pretreatment by surface barrier discharge
Authors
Keywords
Atomic layer deposition, Spectroscopic ellipsometry, Quantum confinement effects, Nucleation density
Journal
APPLIED SURFACE SCIENCE
Volume 345, Issue -, Pages 216-222
Publisher
Elsevier BV
Online
2015-04-14
DOI
10.1016/j.apsusc.2015.03.135

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