Journal
LAB ON A CHIP
Volume 11, Issue 9, Pages 1694-1697Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/c0lc00732c
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Funding
- National Science Foundation [DMR-0820484, ECS-0335765]
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We present a method for high fidelity lithographic patterning on polydimethylsiloxane (PDMS) surfaces employing traditional cleanroom equipment and commercially available materials that overcomes previous problems in PDMS processing. To illustrate this method, an electrostatically actuated microfluidic pump and rectangular diffraction gratings were fabricated on PDMS.
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