Removal of Negative-tone Novolak Chemical Amplification Resist by Chemicals

Published 2010 View Full Article

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Title
Removal of Negative-tone Novolak Chemical Amplification Resist by Chemicals
Authors
Keywords
-
Journal
KAGAKU KOGAKU RONBUNSHU
Volume 36, Issue 6, Pages 589-593
Publisher
Society of Chemical Engineers, Japan
Online
2010-11-29
DOI
10.1252/kakoronbunshu.36.589
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