Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

Published 2013 View Full Article

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Title
Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology
Authors
Keywords
High temperature co-fired ceramic (HTCC), Wireless, Micro-electro-mechanical systems (MEMS), TP212
Journal
Journal of Zhejiang University-SCIENCE C-Computers & Electronics
Volume 14, Issue 4, Pages 258-263
Publisher
Zhejiang University Press
Online
2013-04-09
DOI
10.1631/jzus.c12mnt04

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