Deep reactive ion etching as a tool for nanostructure fabrication

Published 2009 View Full Article

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Title
Deep reactive ion etching as a tool for nanostructure fabrication
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 3, Pages 1520
Publisher
American Vacuum Society
Online
2009-05-31
DOI
10.1116/1.3065991
References
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