Fabrication of crystalline Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system

Published 2009 View Full Article

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Title
Fabrication of crystalline Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 3, Pages 1156
Publisher
American Vacuum Society
Online
2009-05-31
DOI
10.1116/1.3137963

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