Laser micromachining of optical microstructures with inclined sidewall profile

Published 2009 View Full Article

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Title
Laser micromachining of optical microstructures with inclined sidewall profile
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 3, Pages 1048
Publisher
American Vacuum Society
Online
2009-05-31
DOI
10.1116/1.3117344
References
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