Focused ion beam-assisted bending of silicon nanowires for complex three dimensional structures

Title
Focused ion beam-assisted bending of silicon nanowires for complex three dimensional structures
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 6, Pages 3043
Publisher
American Vacuum Society
Online
2009-12-05
DOI
10.1116/1.3259919

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