Ultralow resistance, nonalloyed Ohmic contacts to n-InGaAs

Title
Ultralow resistance, nonalloyed Ohmic contacts to n-InGaAs
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 4, Pages 2036
Publisher
American Vacuum Society
Online
2009-07-31
DOI
10.1116/1.3182737

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