Review on the reliability characterization of plasma-induced damage

Published 2009 View Full Article

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Title
Review on the reliability characterization of plasma-induced damage
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 1, Pages 426
Publisher
American Vacuum Society
Online
2009-02-12
DOI
10.1116/1.3054356

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