Development of plasma-enhanced atomic layer deposition grown Ru–WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications

Title
Development of plasma-enhanced atomic layer deposition grown Ru–WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 2, Pages 631
Publisher
American Vacuum Society
Online
2009-04-03
DOI
10.1116/1.3097856

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