Inductively coupled plasma etching in fabrication of 2D InP-based photonic crystals

Title
Inductively coupled plasma etching in fabrication of 2D InP-based photonic crystals
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 3, Pages 1093
Publisher
American Vacuum Society
Online
2009-05-31
DOI
10.1116/1.3125268

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