Stable tungsten disilicide contacts for surface and thin film resistivity measurements

Published 2009 View Full Article

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Title
Stable tungsten disilicide contacts for surface and thin film resistivity measurements
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 1, Pages 180
Publisher
American Vacuum Society
Online
2009-02-11
DOI
10.1116/1.3071851

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