Large areas of periodic nanoholes perforated in multistacked films produced by lift-off

Published 2008 View Full Article

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Title
Large areas of periodic nanoholes perforated in multistacked films produced by lift-off
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 5, Pages 1745
Publisher
American Vacuum Society
Online
2008-10-14
DOI
10.1116/1.2982240

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