Assessment of the performance of scanning capacitance microscopy for n-type gallium nitride

Published 2008 View Full Article

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Title
Assessment of the performance of scanning capacitance microscopy for n-type gallium nitride
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 2, Pages 611
Publisher
American Vacuum Society
Online
2008-04-18
DOI
10.1116/1.2890705

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