Highly reliable growth process of carbon nanowalls using radical injection plasma-enhanced chemical vapor deposition

Published 2008 View Full Article

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Title
Highly reliable growth process of carbon nanowalls using radical injection plasma-enhanced chemical vapor deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 4, Pages 1294
Publisher
American Vacuum Society
Online
2008-08-22
DOI
10.1116/1.2938397

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