Growth of Si nanowires on micropillars for the study of their dopant distribution by atom probe tomography

Published 2008 View Full Article

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Title
Growth of Si nanowires on micropillars for the study of their dopant distribution by atom probe tomography
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 6, Pages 1960-1963
Publisher
American Vacuum Society
Online
2008-12-16
DOI
10.1116/1.3021371

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