Deposition of NiO[sub x] thin films with radio frequency magnetron sputtering and their characteristics as a source/drain electrode for the pentacene thin film transistor

Title
Deposition of NiO[sub x] thin films with radio frequency magnetron sputtering and their characteristics as a source/drain electrode for the pentacene thin film transistor
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 5, Pages 1787
Publisher
American Vacuum Society
Online
2008-10-14
DOI
10.1116/1.2981075

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