Comparative study of thermally cured and electron-beam-exposed hydrogen silsesquioxane resists

Published 2008 View Full Article

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Title
Comparative study of thermally cured and electron-beam-exposed hydrogen silsesquioxane resists
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 5, Pages 1654
Publisher
American Vacuum Society
Online
2008-10-14
DOI
10.1116/1.2960565

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