Molecular beam epitaxy grown Ga[sub 2]O[sub 3](Gd[sub 2]O[sub 3]) high κ dielectrics for germanium passivation-x-ray photoelectron spectroscopy and electrical characteristics

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Title
Molecular beam epitaxy grown Ga[sub 2]O[sub 3](Gd[sub 2]O[sub 3]) high κ dielectrics for germanium passivation-x-ray photoelectron spectroscopy and electrical characteristics
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 3, Pages 1128
Publisher
American Vacuum Society
Online
2008-06-14
DOI
10.1116/1.2884752

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