Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 6, Pages 2160-2163Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/1.2987960
Keywords
diffractive optical elements; Fresnel diffraction; holography; integrated optics; micro-optics; nanolithography; optical fabrication; ultraviolet lithography; zone plates
Ask authors/readers for more resources
Fabrication of Fresnel zone plates (FZPs) with nanometer scale resolution is one of the major challenges in lithographic fabrication. The authors present a holographic approach to create FZPs where the interference pattern between a spherical beam and a plane wave is recorded to obtain the FZP structure. The spherical beam is obtained by diffraction from a circular aperture (pinhole) in a semiopaque membrane which is illuminated by a spatially coherent extreme ultraviolet beam. The beam transmitted by the membrane serves as the reference plane wave. The resulting pattern gives rise to a FZP with outermost zone width comparable to the dimension of the circular aperture. Fabrication and test results of a FZP obtained with this method are presented. The technique offers a solution to the pattern-placement problem encountered in serial ZP writing techniques as well as high resolution potential.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available