Light modulation with nanopatterned diffractive microelectromechanical system pixels

Published 2008 View Full Article

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Title
Light modulation with nanopatterned diffractive microelectromechanical system pixels
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 6, Pages 2139-2144
Publisher
American Vacuum Society
Online
2008-12-16
DOI
10.1116/1.2998725

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