In-situ spectroscopic ellipsometry study of copper selective-area atomic layer deposition on palladium

Published 2014 View Full Article

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Title
In-situ spectroscopic ellipsometry study of copper selective-area atomic layer deposition on palladium
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 32, Issue 4, Pages 041513
Publisher
American Vacuum Society
Online
2014-06-19
DOI
10.1116/1.4884535

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