Electrical properties of TiN on gallium nitride grown using different deposition conditions and annealing

Title
Electrical properties of TiN on gallium nitride grown using different deposition conditions and annealing
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 32, Issue 2, Pages 02B116
Publisher
American Vacuum Society
Online
2014-01-24
DOI
10.1116/1.4862084

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