Desorption and sublimation kinetics for fluorinated aluminum nitride surfaces

Title
Desorption and sublimation kinetics for fluorinated aluminum nitride surfaces
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 32, Issue 5, Pages 051402
Publisher
American Vacuum Society
Online
2014-08-01
DOI
10.1116/1.4891650

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