Surface modification of nitrogen-doped carbon nanotubes by ozone via atomic layer deposition

Published 2013 View Full Article

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Title
Surface modification of nitrogen-doped carbon nanotubes by ozone via atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 32, Issue 1, Pages 01A124
Publisher
American Vacuum Society
Online
2013-12-19
DOI
10.1116/1.4847995

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