Evolution of sputtered tungsten coatings at high temperature

Sputtered tungsten (W) coatings were investigated as potential high temperature nanophotonic material to replace bulk refractory metal substrates. Of particular interest are materials and coatings for thermophotovoltaic high-temperature energy conversion applications. For such applications, high reflectance of the substrate in the infrared wavelength range is critical in order to reduce losses due to waste heat. Therefore, the reflectance of the sputtered W coatings was characterized and compared at different temperatures. In addition, the microstructural evolution of sputtered W coatings (1 and 5 mu m thick) was investigated as a function of anneal temperature from room temperature to 1000 degrees C. Using in situ x-ray diffraction analysis, the microstrain in the two samples was quantified, ranging from 0.33% to 0.18% for the 1 mu m sample and 0.26% to 0.20% for the 5 mu m sample, decreasing as the temperature increased. The grain growth could not be as clearly quantified due to the dominating presence of microstrain in both samples but was in the order of 20 to 80 nm for the 1 mu m sample and 50 to 100 nm for the 5 mu m sample, as deposited. Finally, the 5 mu m thick layer was found to be rougher than the 1 mu m thick layer, with a lower reflectance at all wavelengths. However, after annealing the 5 mu m sample at 900 degrees C for 1 h, its reflectance exceeded that of the 1 mu m sample and approached that of bulk W found in literature. Overall, the results of this study suggest that thick coatings are a promising alternative to bulk substrates as a low cost, easily integrated platform for nanostructured devices for high-temperature applications, if the problem of delamination at high temperature can be overcome. (C) 2013 American Vacuum Society.