Physical properties of epitaxial ZrN/MgO(001) layers grown by reactive magnetron sputtering

Title
Physical properties of epitaxial ZrN/MgO(001) layers grown by reactive magnetron sputtering
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 6, Pages 061516
Publisher
American Vacuum Society
Online
2013-10-19
DOI
10.1116/1.4825349

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