Influence of process parameters on properties of reactively sputtered tungsten nitride thin films

Published 2012 View Full Article

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Title
Influence of process parameters on properties of reactively sputtered tungsten nitride thin films
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 30, Issue 3, Pages 031506
Publisher
American Vacuum Society
Online
2012-04-04
DOI
10.1116/1.3698399
References
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