Negative plasma potential in a multidipole chamber with a dielectric coated plasma boundary

Title
Negative plasma potential in a multidipole chamber with a dielectric coated plasma boundary
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 30, Issue 3, Pages 031302
Publisher
American Vacuum Society
Online
2012-04-25
DOI
10.1116/1.4705514

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