Impact of parasitic reactions on wafer-scale uniformity in water-based and ozone-based atomic layer deposition

Published 2011 View Full Article

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Title
Impact of parasitic reactions on wafer-scale uniformity in water-based and ozone-based atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 29, Issue 5, Pages 051509
Publisher
American Vacuum Society
Online
2011-08-10
DOI
10.1116/1.3620421
References
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