Structure and properties of nanocrystalline ZrNxOy thin films: Effect of the oxygen content and film thickness

Title
Structure and properties of nanocrystalline ZrNxOy thin films: Effect of the oxygen content and film thickness
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 29, Issue 3, Pages 031506
Publisher
American Vacuum Society
Online
2011-03-18
DOI
10.1116/1.3565487

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