Microstructure and tribological performance of nanocomposite Ti–Si–C–N coatings deposited using hexamethyldisilazane precursor

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Title
Microstructure and tribological performance of nanocomposite Ti–Si–C–N coatings deposited using hexamethyldisilazane precursor
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 5, Pages 1126-1132
Publisher
American Vacuum Society
Online
2010-09-03
DOI
10.1116/1.3463709

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