Atmospheric oxygen plasma activation of silicon (100) surfaces

Published 2010 View Full Article

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Title
Atmospheric oxygen plasma activation of silicon (100) surfaces
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 3, Pages 476-485
Publisher
American Vacuum Society
Online
2010-04-30
DOI
10.1116/1.3374738

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