Novel method for cleaning a vacuum chamber from hydrocarbon contamination

Published 2010 View Full Article

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Title
Novel method for cleaning a vacuum chamber from hydrocarbon contamination
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 6, Pages 1413-1420
Publisher
American Vacuum Society
Online
2010-11-02
DOI
10.1116/1.3484242

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