Nanopatterning of ultrananocrystalline diamond thin films via block copolymer lithography

Published 2010 View Full Article

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Title
Nanopatterning of ultrananocrystalline diamond thin films via block copolymer lithography
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 4, Pages 979-983
Publisher
American Vacuum Society
Online
2010-07-01
DOI
10.1116/1.3299260

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