Spectroellipsometric investigation of optical, morphological, and structural properties of reactively sputtered polycrystalline AlN films

Published 2010 View Full Article

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Title
Spectroellipsometric investigation of optical, morphological, and structural properties of reactively sputtered polycrystalline AlN films
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 3, Pages 495-501
Publisher
American Vacuum Society
Online
2010-05-01
DOI
10.1116/1.3372833

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