Oxygen plasma damage to blanket and patterned ultralow-κ surfaces

Published 2010 View Full Article

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Title
Oxygen plasma damage to blanket and patterned ultralow-κ surfaces
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 2, Pages 207-215
Publisher
American Vacuum Society
Online
2010-01-20
DOI
10.1116/1.3281525

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