High power impulse magnetron sputtering using a rotating cylindrical magnetron

Published 2009 View Full Article

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Title
High power impulse magnetron sputtering using a rotating cylindrical magnetron
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 1, Pages 108-111
Publisher
American Vacuum Society
Online
2009-12-22
DOI
10.1116/1.3271136

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