Resistivity characteristics of transparent conducting impurity-doped ZnO films for use in oxidizing environments at high temperatures

Title
Resistivity characteristics of transparent conducting impurity-doped ZnO films for use in oxidizing environments at high temperatures
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 4, Pages 861-866
Publisher
American Vacuum Society
Online
2010-07-01
DOI
10.1116/1.3455814

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