Structure, optical, and magnetic properties of facing-target reactive sputtered Ti1−xFexO2−δ films

Published 2009 View Full Article

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Title
Structure, optical, and magnetic properties of facing-target reactive sputtered Ti1−xFexO2−δ films
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 27, Issue 5, Pages 1172-1177
Publisher
American Vacuum Society
Online
2009-08-11
DOI
10.1116/1.3168557

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