Thin films by metal-organic precursor plasma spray

Published 2009 View Full Article

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Title
Thin films by metal-organic precursor plasma spray
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 27, Issue 4, Pages 962-969
Publisher
American Vacuum Society
Online
2009-07-01
DOI
10.1116/1.3148826

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