Sputter deposition of Al-doped ZnO films with various incident angles

Title
Sputter deposition of Al-doped ZnO films with various incident angles
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 27, Issue 5, Pages 1166-1171
Publisher
American Vacuum Society
Online
2009-08-01
DOI
10.1116/1.3186618

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