Effect of magnetic field strength on deposition rate and energy flux in a dc magnetron sputtering system

Published 2009 View Full Article

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Title
Effect of magnetic field strength on deposition rate and energy flux in a dc magnetron sputtering system
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 27, Issue 6, Pages 1275-1280
Publisher
American Vacuum Society
Online
2009-09-22
DOI
10.1116/1.3222874

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